The SmartTrak® thermal mass flow meters and mass flow controllers are true multi-gas digital MFC designed to deliver smooth, stable, accurate, and repeatable gas mass flow control you can rely on, every time.
With 10 pre-programmed gases
Note: SmartTrak® series units are available in Europe only!
Capillary Mass Flow Meters and Mass Flow Controllers
Flows from 0-10 mln/min to 0-50 ln/min
Pressure up to 34.5 barg
Capillary Mass Flow Meters and Mass Flow Controllers
Flows from 0-20 to 0-200 ln/min
Pressure up to 34.5 barg
Capillary Mass Flow Meters and Mass Flow Controllers
Flows from 0-500 ln/min
Pressure up to 34.5 barg
Standard version with analog signals and digital RS232 interface
Optional version with local display interface (Pilot Module)
Optional version with remote display interface (Remote Pilot Module)
Optional version with Modbus RTU interface (RS485)
Optional version with Modbus RTU interface (RS485) and local display
| Measuring ranges | |
| Air/Full scale freely selectable | SmartTrak® 100L (Low Flow): 0-10 mln/min to 0-50 ln/min SmartTrak® 100M (Medium Flow): 0-20 to 0-200 ln/min SmartTrak® 100H (High Flow): 0-100 to 0-500 ln/min Flow ranges specified are for an equivalent flow of nitrogen at 1013.25 mbara (760 mm Hg) and 0°C (32°F) For other gases and reference conditions please contact the factory. |
| Instrument versions | |
| “Standard” The economic solution |
Accuracy: ± 1.0% of full scale* Turndown ratio: 1 : 50 (Controller), 1 : 100 (Meter) |
| “Hi-Performance” With high accuracy |
Accuracy: ± 0.5% of full scale* Including 10 point certificate Hi-performance is only possible for: Flow range: up to 50 slpm or nlpm (valid from 10 to 100% of the calibrated range) Gases: Air, Nitrogen, Helium or Argon Other gases and flow: Contact the factory Only valid for units up to an operating pressure of 10 barg and over the temperature range 10°C to 30°C in a horizontal position. The accuracy is only guaranteed under calibrated conditions and is only valid for a period of 6 months after the date of calibration. Valid for 10 to 100% of FS. *An additional error of ±0.25% may apply for analogue signals |
| Performance Data | |
| Media (real gas calibration) | All gases and gas mixtures that are compatible with the selected material. There might be limitations to some corrosive gases |
| Response time | 2 seconds (typical) to within ± 2% of final value (includes settling time), faster or slower available upon request (controllers only) |
| Repeatability | ± 0.2% of full scale (according to SEMI standard E56-0309) |
| Longterm stability | Typical < 2% of measured value / year |
| Power supply | Mass Flow Meters: 15-24 VDC ±10%, (230 mA, regulated) Mass Flow Controllers: C100L: 24 VDC ±10% (500 mA, regulated) C100M: 24 VDC ±10%, (800 mA, regulated) C100H: 24 VDC ±10%, (1260 mA, regulated) (ripple should not exceed 100 mV peak-to-peak) |
| Operation pressure | 0-35 barg (0 – 500 psig) |
| Temperature (environment/gas) | 0 – 50°C (32 – 122°F) |
| Pressure sensitivity | <0.15% / bar (<0.01% / psi) FS (typical N2, horizontal mount) |
| Temperature sensitivity | <0.05% FS measuring range type per 1°C (<0.025% per 1°F) |
| Warm-up time | < 15 min for full accuracy |
| Materials | |
| Meter all wetted metal parts | 316SS (1.4404) |
| Controller body/sensor materials | 316SS (1.4404) |
| Controllers valve post materials | C100L/C101: 316SS/410SS/430SS (1.4404/1.4006/1.4016) C100M: 416SS/430SS (1.4005/1.4016) C100H: 316SS/416SS/430SS (1.4404/1.4005/1.4016) |
| Electronic Housing | Powder coated steel |
| Seals | FKM (Viton®) Options: Neoprene |
| Valve seals | FKM (Viton®) Options: Neoprene, Kalrex® |
| Integration & Installation | |
| Output signals analog | Linear 4–20 mA or 0-20 mA, 500 ohms maximum loop resistance and one of the following (user selectable): Linear 0–5 VDC, 1000 ohms minimum load resistance Linear 0-10 VDC, 1000 ohms minimum load resistance Linear 1-5 VDC, 1000 ohms minimum load resistance |
| Setpoint signals analog | Analog (choice of one, user selectable): Linear 4–20 mA, 0-20 mA. 0–5 VDC, 0-10 VDC, 1-5 VDC |
| Output signals digital | RS232 Optional: RS485; Modbus RTU (Slave) |
| Process connection | Fittings included. Options: Swagelok® (Compression), VCR, VCO, NPT |
| Inlet section | None required |
| Electrical connection | D-15 High density plug (15 pins) female |
| Mounting orientation | All orientations are possible but must be defined at time of order |
| Safety | |
| Burst pressure | 52 bar (240 psi) |
| Leak rate | < 1 x 10-9 mbar l/s He |
| Ingress protection class | IP20 |
| EMC | EN 61326-1 |
| ATEX Certification | None |
Communication with the SmartTrak® series over RS232
Recommended cables: 100-CRN + Optional 100-SerialUSB
To set the communication settings in a COMPOD a terminal software is required.
The free software PuTTY or Windows HyperTerminal can be used.
For further instructions see chapter 7 on the COMPOD operating instructions.
Recommended cables: 100-CRC and RS485 to USB converter
The SmartTrak® DLL helps the customer to create their own software, exactly according to their specifications.
The DLL handles all communication, synchronization and guards line stability.
For Labview drivers please contact the factory.
 | SmartTrak® 100 Product Information | Product Datasheets |  |  | |
| SmartTrak® series Quick Start Guide | Operating Instructions | | | |
| SmartTrak® series Operating instructions | Operating Instructions | | | |
 | SmartTrak® series Configuration Software | Software | | ||
| SmartTrak® series DLL Files | Software | | | |
| SmartTrak® series COMPOD Interface Datasheet | Product Datasheets | | | |
| SmartTrak® 100 Power Supply & Cabling Options | Accessories Datasheets | | | |
| SmartTrak® series COMPOD Operating instructions | Operating Instructions | | | |
 | Application Data Sheet SmartTrak® series 100 / 101 | Inquiry Forms | | | |
| Application Data Sheet SmartTrak® series Compod Module | Inquiry Forms | | | |
| SmartTrak® series Declaration of Conformity CE | Certificates/Statements | | | |
| SmartTrak® series Declaration of Conformity UKCA | Certificates/Statements | | | |
| SmartTrak® series Corrosive Gas Policy | Certificates/Statements | | | |
Do I have to place a filter in the gas line to the flow meter/controller?
If you use gas from a bottle which is clean and dry, there is, in general no need for a filter.
However, there is a risk during start-up of the devices, because dirt particles could be present in the line. It is recommended to install a bypass system, so that the line can be rinsed or can be exposed in response to possible repairs.
In the event that ambient or compressed air is used, the installation of a moisture and dust filter is strongly recommended.
Troubleshooting: Is there a checklist?
Within the troubleshooting pages in the operating instructions, we have summarised error patterns, possible causes and possible measures. If you do not recognise your error pattern or the suggested action is unsuccessful, please contact your Sales Ppartner. If you return the appliance, please refer to the ‘Returns’ section in the operating instructions.
How can the devices be cleaned?
Depending on the type of contamination, the devices can be cleaned on site. You can find more information on this topic in the operating instructions.
Periodic calibration: How often do the devices need to be calibrated?
In principle, the user himself determines the calibrating interval. People often use one per year or in case of very clean gas, one per 2 years. The following questions/points can be helpful:
We suggest the following calibration interval:
1. First inspection after one year
2. After several calibrations have been made in succession, the deviation of calibration to calibration must be evaluated. Based on these data, a decision can be made to adapt the calibrating intervals.
The following influences can lead to an increased deviation:
1. No stable flow, caused by pulsating pumps, e.g.
2. The gas condenses or carries along liquid or dusty particles (applications with ambient air are particularly susceptible to contaminations. A filter needs to be provided here).
3. The effective pressure deviates considerably from the calibrated pressure (+/- 0,2%/bar).
4. The gas/gas mixture is not consistent with the calibrated gas.
5. The aging of electronic components can cause changes, sometimes even improvements. Electrical changes appear as a result of aging or gradual burning of components, which impact the quality of the output signal.
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Vögtlin Instruments GmbH
gas flow technology
St. Jakob-Strasse 84
4132 Muttenz, Switzerland
Vögtlin Instruments GmbH
is a company of TASi Measurement
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