Measuring ranges |
|
Air/Full scale freely selectable |
Body size ¼” from 0 … 25 mln/min to 0 … 60 ln/min (from 0 … 27 SCCM to 0 … 64 SLPM) Body size ½” from 0 … 60 ln/min to 0 … 450 ln/min (from 0 … 65 SLPM to 0 … 480 SLPM) |
Instrument versions |
|
“Standard” The economic solution |
Accuracy: ± 1.0% of full scale* Turndown ratio: 1 : 50 |
“Hi-Performance” With highest accuracy and turndown ratio (available for GSM < 200 ln/min (200 SLPM) / GSC < 150 ln/min (150 SLPM) (air)) |
Accuracy: ± 0.3% of full scale + ± 0.5% of reading* Turndown ratio: 1 : 100 *An additional error of ±0.25% may apply for analogue signals |
Performance Data |
|
Media (real gas calibration) |
Air*, O2*, N2, He, Ar, CO2, H2, CH4, C3H8 (other gases and gas mixtures on request) *O2 & N2 are calibrated with air |
Response time |
Meter (GSM): ± 80ms*; Controller (GSC): ± 500ms* *depending on device configuration & according to SEMI standard E17-1011, 5-100% of range under optimized conditions |
Repeatability |
± 0.2% of full scale (according to SEMI standard E56-0309) |
Longterm stability |
< 1% of measured value / year |
Power supply |
24 Vdc (18 – 30 Vdc), 15 Vdc on request |
Current consumption Standard |
Meter (GSM): max. 100 mA; Controller (GSC): max. 250 mA (GSC with valve type 8 max. 490mA) |
Current consumption Profinet RT / EtherCAT |
Meter (GSM): max. 125 mA; Controller (GSC): max. 340 mA (GSC with valve type 8 max. 560mA) |
Operation pressure |
0.2 – 11 bar a (3 – 160 psia) / GSC with valve type 4.5 and 8 max. 8 bar a (120 psia) |
Temperature (environment/gas) |
0 – 50°C (32 – 122°F) |
Body Materials |
Anodized aluminum, optional stainless steel electropolished |
Seals |
FKM, EPDM, optional FFKM |
Pressure sensitivity |
< 0.2% / bar of reading (typical N2) |
Temperature sensitivity |
0.025% FS measuring range type per 1°C (<0.012% per 1°F) |
Warm-up time |
< 1 sec. for full accuracy |
Integration & Installation |
|
Output signals analog |
0-20 mA, 4-20 mA, 0-5 V, 1-5 V, 0-10 V, 2-10 V |
Output signals digital |
RS-485; Modbus RTU (Slave); LabView-VIs available Option: Profibus DP-V0, DP-V1 / Profinet RT / EtherCAT |
Process connection |
G¼” (BSPP* female) up to 60 ln/min (64 SLPM) G½” (BSPP* female) up to 450 ln/min (480 SLPM) *British Standard Pipe Parallel |
Inlet section |
None required |
Electrical connection |
Sub D plug, 9 pole |
Mounting orientation |
Any position (consult manufacturer above 5 bar or vertical mounting) |
Safety |
|
Test pressure |
16 bara (240 psia) |
Leak rate |
< 1 x 10-6 mbar l/s He |
Ingress protection class |
IP50 |
EMC |
EN 61326-1 |